Microtome Precision Inc
Microtome Precision Inc has been a trusted leader in precision engineering for over 35 years, specializing in reticle handling solutions for the semiconductor industry. As the world’s longest-established independent manufacturer of reticle cassettes and SMIF pods—first introduced in 1989—we continue to set the standard in reticle protection. Today, our focus is on design, assembly, certification, and customer support, while the manufacturing of our product components is entrusted to a specialized supply chain. A recognized authority in safeguarding reticles (photomasks) from electrostatic damage, our groundbreaking research in 2003 uncovered a previously unknown damage mechanism. This discovery led to updated industry guidelines for reticle protection, now incorporated into the International Technology Roadmap for Semiconductors and SEMI Standards (E163). Through technical publications and our electrostatic consultancy service, we actively promote a deeper understanding of electrostatic risks to reticles. Additionally, our patented solutions offer innovative protection for semiconductor manufacturing environments. We produce SEMI Standard-compliant and customized reticle cassettes and SMIF pods, certified for use with lithography equipment from ASML, Nikon, and Canon, supporting reticles ranging from 5-inch or 6-inch sizes. Our latest innovation is an enhanced all-metal single-reticle SMIF pod, designed for short-distance transport outside ESD-protected zones. This advancement enables local reticle fabrication and direct transport to the point of use within a SMIF pod—eliminating the risks associated with transferring reticles between containers. For more details on our cutting-edge solutions, visit our website.
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Debra Pilarski
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Matt Pilarski
President · General Business & Management
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