Phoenix Innovation, Inc

Refurbishment and repair, consumable spare parts, surplus parts and equipment for Semiconductor Manufacturing. We refurbish electrostatic chucks (ESC's), MCA ESC's and Heaters, Polyimide ESC's, Ceramic, Stainless and Aluminum Heaters, Power Supplies, RF Generators, HDP Domes, Chamber Liners, Lift Assemblies, Susceptors, Welded Bellows, Controllers, Chillers, Heat Exchangers, and more. We rework anodizing, yttrium oxide yttria, aluminum oxide alumina, polymer coatings. We manufacture parts from engineered plastics like Vespel, PEEK, Teflon PTFE, Ultem, and Delrin acetal, ceramics, quartz, sapphire, silicon, silicon carbide, graphite, metals like stainless steel, aluminum, inconel, hastalloy, molybdenum, nickel, and almost any other material. Our warehouses have thousands of surplus parts and equipment from most major semiconductor equipment manufacturers.