Andrei Uvarov
R & d Tech Lead Product Development Manager at Plasma-Therm
Based in Grenoble, France
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Seniority
Manager
Department
Other
Location
Grenoble
Industry
Semiconductors
Company size
192
Contact information
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Background
About Andrei Uvarov
Over 15 years in plasma technology, combining profound academic knowledge and rich industrial experience. Plasma technology expert: Etching: ICP, RIE, DRIE, Microwave ECR. Deposition: PECVD, ICPCVD, pulsed CVD. Hardware design, radio-frequency power delivery, vacuum technology, process development, thin-film characterization. Accomplished project lead: Developing plasma process and hardware solutions adopted in R&D and production markets worldwide including Germany, Switzerland, France, China, Singapore, South Korea, and contributing to 22% CAGR in current position. Leading the team of PhD process engineers. Proficient researcher-developer: PhD thesis on CVD of PTFE-like films, national grant funding recipient, 19 peer-review publications. Designed and developed ICPRIE equipment for MEMS and power semiconductor markets.
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