Fred Kelley
VP Sales for Metrology Products at Classone Equipment
Based in San Francisco, United States
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Seniority
Vp
Department
Other
Location
San Francisco
Industry
Semiconductor Manufacturing
Company size
49
Contact information
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f•••••••@classoneequipment.com
Phone
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Background
About Fred Kelley
Pivotal Systems makes a revolutionary smart Gas Flow Controller(GFC). It is physically different from the current Thermal and Pressure based Mass Flow Controllers (MFC's) in that it uses two piezo-actuated valves which work together in a unique way offering closed loop control and it has internal gas volume so it can measure rate of (pressure) drop for in-situ real flow measurement. What this means for all the process tools in the world is better accuracy, better settling time, insensitivity to upstream and downstream fluctuations, larger flow range, no calibrations are needed, NIST traceability, and more. This can save fabs a lot of money.
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