Fumitaka Amano
Senior Manager at Western Digital
Based in Mie, Japan
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Seniority
Manager
Department
Operations
Location
Mie
Industry
Computer Hardware Manufacturing
Company size
23K
Contact information
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f•••••••@westerndigital.com
Phone
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Background
About Fumitaka Amano
Expert in atomic layer deposition (ALD) and chemical vapor deposition (CVD) and Chemical Oxide Removal (COR) process development which are including plasma enhanced process. Extensive experience with process optimization and reactor design, assembly, and operation on single wafer deposition platform. Expert on gate stack materials processing (high-k, interface, and metal gate), Advanced contact integration scheme (including preclean, silicide/HiK, metal), and Backend metal process solution. In-depth knowledge of, extensive hands-on experience with, and expertise in data interpretation for the following analysis and metrology systems: AES, XPS, XRD, XRR, XRF, RBS, SIMS, SEM, TEM, EDX, EELS, Elipsometry, current-voltage (I-V) and capacitance-voltage (C-V) measurements and four point probe sheet resistance measurements.
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