Kevin Pears
Etch Eng at Clas-Sic Wafer Fab Ltd
Based in United Kingdom
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Seniority
Staff
Department
Engineering
Location
United Kingdom
Industry
Semiconductor Manufacturing
Company size
53
Contact information
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k•••••••@clas-sic.com
Phone
5 credits+44 ••• •••• ••••
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Background
About Kevin Pears
Career" plasma etch engineer / technologist with experience in just about every area of plasma etch technology. Initially I specialized in recipe development (HAR, dielectric, poly, metal, hard masks, TSV, Bosch) however latterly I gained a lot of experience in hardware development and testing. At Micron I worked on both process and equipment (Lam FX and FXP tool owner) and I am investigating new VI probes for advanced chamber monitoring, all this work is at the very leading edge of plasma etch technology. I've published mainly for recipe development, however I've patents in a number of areas including new process chemistry, process integration and hardware developments (~40+, many filed in China as ·). Specialties: R&D, highly experienced in plasma etch recipe development across a wide range of process levels for DRAM and logic devices. Hardware development and initial characterization of new hardware.Experienced in chamber fault finding and chamber matching.Experienced in all the analysis techniques (SEM/TEM/FIB/EDX/XPS/Auger/SIMS).
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