Leon Su

Background

About Leon Su

As Vice President of Engineering at KLA, I lead a global, multidisciplinary organization of over 200 engineers and scientists across mechanical, electrical, optical, software, systems, and controls engineering. My focus is on architecting and executing long-term R&D strategies that align with KLA’s vision and the evolving demands of the semiconductor industry. I oversee the full product lifecycle—from initial concept and system architecture to design, prototyping, validation, and transition to high-volume manufacturing. My teams deliver world-class solutions that advance capabilities in e-beam lithography, high-resolution inspection, and AI-enabled metrology. By fostering a culture of technical excellence, cross-functional collaboration, and continuous innovation, we drive transformative breakthroughs that enable next-generation semiconductor manufacturing. Previously, I led the REBL Division at KLA, where I spearheaded the development of cutting-edge reflective electron beam lithography technologies, and held senior leadership roles in control systems and systems engineering. Prior to KLA, I served in advanced systems engineering leadership positions at Bose Corporation, delivering innovative audio technologies for consumer and automotive markets.