Ray Cirelli
Visiting Researcher at Princeton University
Based in Hillsborough, United States
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Seniority
Staff
Department
Research & Development
Location
Hillsborough
Industry
Higher Education
Company size
11K
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r•••••••@princeton.edu
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Background
About Ray Cirelli
193nm Deep ultraviolet (DUV) nanolithography. Process flow design and implementation for MEMS, CMOS and nanofluidic device fabrication. RIE etch, PECVD film deposition, Metals deposition and related metrology. Specialties: Nanofluidics for Bio applications, MEMs sensors and spatial light modulators, High aspect ratio structures, Inorganic AR coatings, LIGA
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