Robert D. Clark

Background

About Robert D. Clark

Highly successful innovator, manager and collaborator with over 100 patents, 200 publications, and decades of experience building and driving successful partnerships with device makers, foundries, consortia, universities, suppliers and equipment makers to develop new semiconductor processes and equipment enabling current and future generations of logic, memory and storage devices. Recognized for the development of high k dielectrics, ReRAM, ferroelectric films, metal gates, DRAM capacitor/electrode stacks, dipole and crystal phase engineering, low resistivity interconnects, and vapor phase silicide contacts.Expert in advanced ALD/CVD/ALE and selective thin film processes and associated treatments, etches/cleans, metrology/characterization and equipment complemented by a deep understanding of inorganic/organometallic and surface chemistry as well as module integration. Led or played leading roles in teams that produced innovations which have generated billions of dollars of revenue over the last two decades. Currently working to enable Zetta-scale computing systems and Ångstrom-class chips.