Robert Haney

Background

About Robert Haney

Hello,My experience spans 30 years of process and equipment development in the semiconductor industry. This ranges from inception of new process flows, defining metrology needs, management of QC departments, supply chain management, contract compliance, ECOs, first article testing, etc. I have had success with the modification and refinement of production tools to meet the company’s production cost models. Also, a great deal of time is involved with generating the process tools for future technology nodes. I have been through this cycle from 2um to 22nm design rules and from 75mm wafer to 450mm wafer sizes. The other aspects of my experience is with defectivity characterization, the selection of appropriate metrology technologies, defining SPC rules, optimization of device yield characteristics and refine cost effectiveness of the process line. In a nutshell, the focus has been involvement in R&D NPI with Fairchild, ASML, Nikon, Intel and Applied Materials. During my career I have worked in a variety of environments and locations. Often, I have worked for extended time periods remote either at supplier sites or with end customers. My reputation in these roles has always been well received and considered a positive impact to the business model. Often situations have had a legacy of miscommunication or tension from past interaction. It has been my responsibility to foster the communication between team members, groups and companies to find a constructive working point. I pride myself on being able to come up to speed quickly to be effective toward the task at hand and create a solution.Specialties: Process Applications - CVD, PVD, Metrology, DR-SEM Photolithography, CD-SEM