Robert Zimmermann
Physiker in Der Halbleiterindustrie at Applied Materials
Based in Kirchheim bei München, Germany
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Staff
Department
Other
Location
Kirchheim bei München
Industry
Semiconductor Manufacturing
Company size
30K
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Background
About Robert Zimmermann
Funded by the Gordon and Betty Moore Foundation, our group is working in collaboration with groups from Stanford, MIT and Delft on the development of a quantum electron microscope. A quantum electron microscope should make it possible to study even sensitive proteins at atomic resolution with low radiation exposure. As part of my work, I developed and tested microwave guide structures that are necessary as resonators and beam splitters for electrons to realize such a microscope. Furthermore, we developed and showed electrostatic pendants to the microwave structures, which despite technically different, have the same working principle. In addition, we built an electron biprism interferometer to study the coherence of electron beams. Publications: • R. ZIMMERMANN, P. Weber, M. SEIDLING, AND P. HOMMELHOFF, Beam splitting of low-energy guided electrons with a two-sided microwave chip. Applied Physics Letters, 2019. 115, 104103, DOI: 10.1063/1.5117355. • R. ZIMMERMANN, M. SEIDLING, AND P. HOMMELHOFF, Charged particle guiding and beam splitting with auto-ponderomotive potentials on a chip. Nature Communications, 2021. 12(1): p. 390, DOI: 10.1038/s41467-020-20592-4. • M. SEIDLING, R. ZIMMERMANN, AND P. HOMMELHOFF, Chip-based electrostatic beam splitting of guided kiloelectron volt electrons Applied Physics Letters, 2021. 118(3), DOI: 10.1063/5.0030049.
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